Topic: Plasma-activation high-performance semiconductors. Super-fine wafer cleaning. Chip bonding. Gluing chips. Manufacturing semiconductors.

Non-vacuum processing – Openair® plasma unleashes new potential for the manufacture of semiconductors

Silicon wafers, chips, and high-performance semiconductors are highly sensitive electronic components. As these technologies have developed, so has low-pressure plasma technology as a manufacturing process.
The enhancement of the Openair® Plasma process under atmospheric pressure opens up entirely new possibilities, in particular for automation. A vacuum is no longer required for plasma treatment, so process flows can be greatly simplified.

More advantages of Openair® Plasma systems:

  • Super-fine cleaning (component cleaning) without damaging sensitive structures;
  • Targeted functionalization of surfaces for selective additional processing;
  • Lean process layout, noticeable cost savings; and
  • Lower error rates in bonding processes.

Plasmatreat (UK) Ltd.
36 Grange Park
Steeple Aston
Bicester
OXON OX25 4SR
Great Britain

Phone: +44 1869 340478

Contact: Mr. Graham Porcas
grahamporcas@btconnect.com

 
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Glasstec 2016
Glasstec 2016
International Trade Fair for Glass Processing, Production and Products

20. – 23. September 2016
Hall 11, Booth G46
Düsseldorf, Germany

Micronora 2016
International microtechnology and precision trade fair

27. – 30. September 2016
Micropolis / Parc des Expositions
Besancon Cedex, France

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